单CCD双光路三角法宽幅膜在线测厚研究-测试测量技术及仪器专业论文.docx

华中科技大学硕士学位论文 华 中 科 技 大 学 硕 士 学 位 论 文 Ⅱ Ⅱ Abstract Nowadays, Lithium battery is a relatively ideal mobile power. It’s widely used in portable electronic products, Electric vehicles, uninterrupted power supply (UPS), and the power transmission system, etc. The thickness of pole piece’s coating and its uniformity has a direct influence on the performance of lithium battery, such of its capacity, service life, security, etc. So, It’s very important to measure the thickness of pole piece’s coating online. In this paper, some of the existing coating thickness measurement methods were analyzed and compared. According to the demand of lithium battery coating thickness measurement, a single CCD dual-optical path laser triangulation online thickness measurement system for wide- film is designed. In this system, the upper ( lower ) laser beam focused onto the upper( lower ) surface, and then the upper and lower two speckles were imaged onto the same CCD through the optical system. The thickness for measurand can be calculated base on the relationship between the thickness value and the speckles on image plant. However, due to the relatively independence of the upper and lower optical path, the light deflection and the nonlinear aberration in this system, the relationship between the thickness value and the speckles on image plant is no longer simple. According to the imaging characteristics, a non-linear model is established to correct the relationship between the thickness value and the speckles on image plant in this system. In this paper, the impact of speckles, temperature and oblique of object plane in this system is analyzed through experiments. Some useful solutions also put forward in this paper. The field results show that, in the measurement range, the measurement error of the system within ± 2um, and the repeatability within ± 1um. So, the accuracy for this measurement system can meet the requirements of online thickness measurement for lithium battery pole piece co