磁浮平面电机运动控制系统硬件设计-机械电子工程专业论文.docx

华 中 科 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract Magnetically levitated planar motor, which is a planar motion structure, is composed of a stator and a translator. The translator of this planar motor is suspended above the stator with no support other than magnetic fields, and can realize large range planar motion. Because of the active magnetic bearing the translator can move in six degrees-of-freedom. Compared with the traditional stacked linear motors, this type of planar motors with simple structure, high speed and high precision can be used in ultra violet and extreme ultra violet semiconductor lithography systems as one lynchpin of them.Study on this kind of motor is very important and significative for promoting the technology of semiconductor lithography systems with high performance. In this thesis, the motion control system hardware of magnetically levitated planar motor was designed. According to the features of the motion control and coils current decoupling and control program requirements，the hardware structure of motion controller based on DSP+FPGA and power amplifier were designed .The hardware circuits on motion controller were designed such as: the subsystem circuits of DSP and FPGA, analog and digital I/O interface circuits, RS-485 high-speed communication circuit, high-speed parallel bus interface circuits and power supply circuit. The hardware circuits on power amplifier were designed such as: interface circuit, PWM circuit, power bridge circuit, LPF circuit, current feedback circuit, and overload protection circuits. Finally the integrity and stability of motion controller and power amplifier were verigied and tested on the system debugging platform. The motion control system hardware of magnetically levitated planar motor is open-ended, and the number of coils drived by the servo system can be expanded to 32. Tests show that the motion controller and power amplifier can achieve good driving performance: the PWM switching frequency can be up to 100