磁控溅射CrCN镀层微观组织结构与力学性能研究-材料科学与工程专业论文.docx

Abstr.act Title: STUDY ON MICROSTRUCTURE AND MECHANICAL PROPERTY OF CRCN COATING BY MAGNETRON SPUTTERING PLATING Major: Materials Science and Engineering Name: Jianguo GONG Supervisor: Prof. Bailing JIANG Abstract  Signature:l叫丘 年A生 Signature: 1/ J ，A\a ，，- _j Different carbon content and different nitrogen content CrCN coatings were deposited by Magnetron sputtering through changing carbon current and nitrogen f1ow.  The chemical composition and microstructures of the coatings were analyzed by XPS ，TEM and SEM. The hardness and friction and wear behavior of the coatings were measured using a Vickers micro-hardness tester and pin-on-disk tester. Analyzes and summàrizes with carbon and nitrogen content changes on influence of the microstructures and mèèhanical properties of the CrCN coatings. Discusses the CrCN microhardness and tribologicat .properties of regulation mechanism of coating，The results show that:the Sp3 C-C bond content in the coating and microstructures of the coating significantly affect the hardness of the coating，the Sp3 C-C bond content in the coating properties of the coating. and the dispersion of carbon significantly affect the tribological The results indicate that carbon of CrCN coatings consist of Sp2 C-C bond ，Sp3 C-Cbond and C-Cr bond; Wi由the carbon target current gradual1y increases from 0 to 1.5 A，the content of Sp2 C-C bond in the coatings increases gradual1y，the content OfSp3 C-C bond in the coatings after rising first down; The dispersion of carbon in the coating increased leads to the average grain size decreases from 80nrn to lOnrn(At this point ，the CrN nanocrystalline dispersion embedded in amorphous graphite formed in the nano composite structure); The Sp2 C-C bond content，Sp3 C-C bond content and grain refmement combined e旺ect makes the hardness of CrCN coating increased first and then decreased ，the hardness in carbon target current of 1.2 A is reached the