氮化铝兰姆波MEMS谐振器在滤波器及传感器方面的应用研究-仪器科学与技术专业论文.docx

中文摘要 中文摘要 万方数据 万方数据 本文介绍了氮化铝兰姆波 MEMS 谐振器以及基于该谐振器的带 通滤波器、传感器的设计与制造。氮化铝兰姆波 MEMS 谐振器是一 种新型压电谐振器，其制造工艺与集成电路工艺兼容，且可实现多频 率器件的单片集成；其品质因子较高，可应用于振荡器、滤波器及传 感器的设计中，故其相关研究受到了广泛关注。 本文首先介绍了氮化铝兰姆波谐振器的工作原理，对其设计和制 造进行了深入研究。研究表明谐振器尺寸对其性能系数（FOM）有较 大影响，谐振器的最优设计尺寸可使 FOM 达到最佳。基于该规律， 本文设计制造了基于该谐振器的中频窄带滤波器，该滤波器表现出了 较低的插入损耗和陡峭的滚降。 之后，本文继续优化了滤波器设计。通过结合电容电感网络，滤 波器实现了与 50 欧姆射频系统的匹配；本文进一步将兰姆波滤波器 与电容集成，系统整体的面积进一步缩小，电路设计进一步简化。 另外，本文还研究了兰姆波谐振器作为传感器的特征，尤其是其 在液相环境下的表现。为减小液体对谐振器性能的削弱，本文将微流 体技术与谐振器集成，这样，传感器不仅可以实现极小量样本检测， 其优良性能还可以得到维持，保证传感器拥有更小的探测极限和更高 的灵敏度。 关键词：兰姆波；氮化铝；压电 MEMS 谐振器；带通滤波器；传感 器 A ABSTRACT This paper reports on the design and fabrication of MEMS Lamb wave resonators (LWRs), band-pass filters and sensors that are based on the resonators. MEMS Lamb wave resonators are novel type piezoelectric resonators, which are compatible with the integrated circuits and are promising to achieve multi-frequency devices on a single wafer. They have high quality factors and can be employed for oscillators, filters and sensors applications. Therefore, research on them is widely developed. Firstly, this work presents the principle of operation of Lamb wave resonators, after which the design and fabrication of them are investigated. It discloses that the resonator geometry has a great impact on the Figure of Merit and there exists an optimized value of the geometric parameters for the best design. Based on this principle, this work designs and fabricates intermediate frequency narrow band filters, which present a low insertion loss and steep roll-off. Next, this work further optimizes the filter design. Cascaded with a pair of capacitors and inductors, the filters succeed in being well matched to 50 ohm radio frequency (RF) systems. Furthermore, Lamb wave filters are integrated with the capacitors, thus contributing to greater size savings and circuit simplification. In addition, this work investigates the resonators for sensors applications, especially their response in liquid environment. In order to allevi