基片偏压占空比对多弧离子镀TiAlSiN涂层形貌及力学性能-表面技术.PDF

第46 卷 第 11 期 表面技术 2017 年11 月 SURFACE TECHNOLOGY ·237 · 基片偏压占空比对多弧离子镀 TiAlSiN 涂层形貌 及力学性能的影响 王璐，金永中，林修洲，陈昌浩 （四川理工学院 材料科学与工程学院，四川 自贡 643000） 摘 要： 目的采用多弧离子镀膜技术在硬质合金基体表面沉积 TiAlSiN 涂层，研究占空比参数对 TiAlSiN 涂层的表面形貌和力学性能的影响。方法 使用扫描电子显微镜对涂层的形貌进行观察，使用自动划痕仪、 纳米压痕仪对涂层的力学性能进行检测。结果 占空比在10%~70%范围内增加，离子轰击得到加强，涂层表 面得到很好的改善，大颗粒与微坑缺陷数量逐渐减少。当占空比增大到 90%时，大颗粒和微坑缺陷数量反 而增多。结论 随着占空比的增加，纳米硬度、弹性模量和涂层结合力均先增大后减小，占空比为50%时， 分别达到最大值48.15 GPa、518.24 GPa、50.55 N。 关键词： 多弧离子镀；TiAlSiN 涂层；占空比；表面形貌；力学性能 中图分类号：TG174.442 文献标识码：A 文章编号：1001-3660(2017)11-0237-04 DOI ：10.16490/j.cnki.issn.1001-3660.2017.11.032 Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating WANG Lu, JIN Yong-zhong, LIN Xiu-zhou, CHEN Chang-hao (School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, China) ABSTRACT: The work aims to study effects of duty cycle parameters on surface morphology and mechanical properties of TiAlSiN coating by depositing TiAlSiN coating on the surface of cemented carbide substrate by adopting multi-arc ion plating. Morphology of the coating was observed with scanning electron microscope, and mechanical properties of the coating were de- tected with automatic scratch tester and nano indentation tester. With the increase of duty cycle (10%~70%), the ion bombard- ment was strengthened, and the coating surface was greatly improved, large particles and tiny-pit defects decreased gradually. However, large particles and tiny-pit defects increased as the duty cycle increased to 90%. Nano-hardness, elastic modulus and adhesion of the coati