基于SOI级联双环的耦合谐振腔诱导透明效应的研究-物理电子学专业论文.docxVIP

基于 SOI 级联双环的耦合谐振腔诱导透明效应的研究 摘 要 随着硅基光电子学的迅速的发展，应用光信号代替电信号作为信息的载体越来越受 到关注，而硅基光电子器件凭借其成本低、工艺兼容性好、微纳光学特性良好等优点， 是集成光学中最有潜力的材料平台，因此它成为了国内外研究的热点。而基于SOI的环 形谐振腔结构具有结构微小、系统稳定、相互干扰度低、品质因数高等优势，已经成为 硅基光子器件中重要的基础原件，在很多领域都可以应用。最近一种在光学谐振腔中实 现类电磁诱导透明效应成为研究热点，但大多数研究都是基于二氧化硅微球谐振腔腔， 玻璃微盘谐振腔，光纤谐振腔等，在硅基微环谐振腔上实现这种效应的研究不多。 本文主要分析了谐振腔耦合诱导透明效应的实现条件，参数控制，然后在SOI基片 上利用高精度电子束光刻和感应耦合等离子体刻蚀等工艺进行了波导微环结构的设计 加工，最后利用光栅垂直耦合的方式进行了光纤与芯片的耦合对接，在并联双环谐振腔 结构中观察到了诱导透明效应，并且分析了两环间不同间距对类电磁诱导透明效应的影 响。工艺中单环Q值达到5.1×104，类电磁诱导透明效应的透明峰的带宽约为500MHz。 关键词：集成光学，耦合谐振腔诱导透明效应，SOI，微环谐振腔 The Coupled-resonator-induced Transparency Based on Cascaded Double-ring Resonators in SOI Abstract With the development of the silicon-based optoelectronics, it becomes more and more attractive using the optical signal instead the electrical signal to be the carrier of information. The silicon based optoelectronic devices have the unique advantage on the transmission, control and processing of the light and many other application of optical physical properties, so that it has become the research of hot topic in recent academic world both domestic and overseas. The micro ring resonator based on silicon on insulator has many advantages such as the micro size, the stable system, the low interference degree and the high quality factor that it has become the basic and important component of the silicon-based optoelectronic devices and it can be used in many fields. Nowadays an effect likes the Electromagnetically Induced Transparency generated in the optical resonators has become the research hotspot. And most of the research on the effect are usually focus on the optical resonators such as the microsphere, microdisk and the fiber resonators, but there only a few research on the effect that based on the micro ring resonator based on silicon. In this article, we firstly analyzed the realization condition of the coupled resonator induced transparency. Then we designed and fabricated the micro ring resonators on the SOI with the high accuracy electron