GB/T 3163-1993真空技术术语.pdf

621.52:006.72 U3D7C8 }CJ8 中 华 人 民 共 和 国 国 家 标 准 GB/T 3163一93 真 空 技 术 术 语 Terminologyforvacuum technology 1993一12一30发布 1994一08一01实施 国 家 技 术 监 督 局 发布 目 次 1主题内容与适用范围(1) 2 引用标准 ·“”··············”··”·“···········““·”·······“············“············““·······“·…… (1) 3 一般术语 价······“·························”···········”···································“·”…… (1) 4 真空泵及有关术语··························”··价··”···························“·········“一 (5) 5真空系统及有关术语”········“”················”·········”·······················“··”··…·… (10) 6 真空计 “·············””·“···“··”···“”·”·”·“·“·”·········”·········“····················一· (15) 7 检漏及有关术语 ·················“·”·······“·”·········”·”··········”·······················“·… (18) 8 真空镀膜技术 ··一 (20) 9真空千燥和冷冻干燥····”·”··················“·········“”·”······“························…… (23) 10 表面分析技术 ···”·······“·”·······“·”············”··········“·”···················“·····…… (27) 11 真空冶金 ············“·········“·”········”·”···········”··········”·”························”一 (31) 附录A 中文索引(补充件)·························”·······”·”·······““·”··········“··”… 〔35) 附录B 英文索引(补充件) ······“···················································“”·············”… (42) 中华 人民共和 国国家标 准 GB/T3163一93 真 空 技 术 术 语 代替GB3163-82 Terminologyforvacuum technology 本标准参照采用国际标准ISO3529-1981真《空技术名词术语》。 主题内容与适用范围 本标准规定了真空技术方面的一般术语、真空泵术语、真空计术语、真空系统术语、真空检漏术语、 ri空镀膜技术术语、真空干燥术语、表面分析术语和真空冶金术语。 本标准适用于真空技术方面的技术文件、标准、书籍和手册等有关资料的编写。 弓1用标准 CUB 3101 有关量 、单位和符号 的一般原则 GB 6306.1-6306.4 变容真空泵性能测试方法 GB 6307.1-6307.2 蒸汽流真空泵性能测试方法