基于pvdf的智能微夹钳的研究-控制理论与控制工程专业论文.docxVIP

II Abstract As the nanotechnology, optoelectronics and micro-electro-mechanical systems (MEMS) and a series of microscopic objects come into our research horizons, the tiny, complex small parts became the main target. During the fabrication and assembly process, robots are required. Micromanipulation system is the offspring of the development of robot technology in the field of micro-world. As an important part of micromanipulation, microgripper is a device with special structure driven by a variety of different powers, used to realize the precise and flexible motion. It has a wide range of ap