4HSiC高温激活退火对F离子扩散影响.pdfVIP

Smart Grid 智能电网, 2018, 8(1), 8-15 Published Online February 2018 in Hans. /journal/sg /10.12677/sg.2018.81002 Effect of High-Temperature Activation Annealing on F Ion Diffusion in 4H-SiC 1 2 1 1 1 Caiping Wan , Honglin Tian , Shihai Wang , Qinpei Zhou , Hengyu Xu 1 Institute of Microelectronics, Chinese Academy of Sciences, Beijing 2 State Key Laboratory of Advanced Power Transmission Technology, Global Energy Interconnection Research