数字HIC平面设计与工艺研究.docVIP

数字HIC平面设计与工艺研究 摘 要 根据数字混合集成电路的设计原理及设计指导规则，结合现有的薄膜混合集成电路制造工艺，对双稳态触发器电路进行了电路的平面图形设计，并绘出了电路工艺版图，对所用的膜电阻、膜电容的材料进行了说明，对外贴式元件（三极管，二极管）的放置位置进行了设计说明。 关键词：混合集成电路，薄膜工艺，材料,膜电容，膜电阻 The Graphic Design of Digital Hybrid Integrated Circuit And Technology Abstract According to the design principles and design rules of digital hybrid integrated circuit and the thin film manufacturing technology of hybrid integrated circuit, The Graphic of bistable flip-flop was designed, at the same time, its Process layout was drew. Besides, the material’s choice of Membrane resistance and Membrane capacitance have been expl