电弧源控制系统的设计-光学工程专业论文.pdf.docxVIP

Design Design of arc ion source control system Discipline：Optical Engineering Student Signature：厶蜒五 Su| Sienature： ．叱l如 Abstract m recent yearoptical thin films are widely used in industrial field．ArC ion platiIlg ‘ecnnology has become a popular technology in the field of thin films p刚uC崦due to its 姗que adv眦培es，which has several advantages compared to the other 6h11s produCiIlg technology，such the higher ion deposition rate，higher ion energy and l鹕er ta]曙et，s io蝴on production，involving the p刚ucti锄of枷 rate·So it IS啪dely used in the field of industrial tool,lamps，home decoration,mould,stainless steel and SO on．Thin films that produCed by arc 10n pl砌唱technology has better uniformity，higher hardness and s们ngcr we盯-resistance， these ctla】眦teristiCS make the tools have longer using time，make more econornic profits and bmg convemenee to people’s life，SO arc ion plating technolog)r not砌y 11as a bencr developing prospect，but also has potential I．esearch value． HoweVer，there are two main problems in the current arc ion plating machines：fil?瓯thc automation level of arc ion source control system is not high；second，t11e anti—intemrence ablll够。士tlle arC source control system is poor．This paper mainly solves these two problems． and re士omes the traditional manual arc ion plating electrical arc source con仃ol SyStem，讹ch naS 1mpmV∞its automation degree，enhance its anti-interference ability that will help arc coating technology to have a further promotion． 1 nrou班repeated practice，ultimately，we has determined the design scheme lme tllis： uslng a PLC as the control core which will be configured with a A／D conversion mo叫ar锄d touch screen constituting as the hardware system，and designe software Sy蜘attlached t0 t11e n删w玳system，which will upgrade the current device．At first，this paper has in仃oduced me backgro咖and significance of the and then all topic， give overview to arc ion p1如g technology，aarifies the definition of arc and arc discharge，in仃oduce the advantages觚d appllcati