基于超快激光的超光滑光学表面制造技术研究-精密仪器及机械专业论文.docxVIP

优秀毕业论文 精品参考文献资料 研究生优秀毕业论文 Research Research on Ultrafast Laser Polishing Monocrystalline—Silicon Discipline：precision instrument and machinery Student Signature：厶j水伽蜘 Supervisor Signature： Abstract With the development of related disciplines，achieving ultra smooth polish of optical surface has become an important research in the precision machining．Laser polishing technology as a surface handle technology with good polishing effect and less thermal effect，has an unparalleled advantage in high—precision polishing relative to conventional polishing techniques． There were discussed in this article that the mechanism of ultrafast laser for optical materials， polishing system structures，experimental design，implemem and test data analysis．Build a dynamic model of ultrafast laser polishing quartz，explore the ultrafast laser polishing process。 In the experiment，the laser source uses fs and ps laser， utilizes digital microscope and surface profile to detect the surface morphology and roughness．And the effects that laser energy density，overlap spot rate and defocusing amount to ultrafast laser polishing Was Analysed．It can Analysis the factors share of the weight in the polishing，affect changes in the level of each factor to the polishing effect intuitive respectively by orthogonal experimental design and univariate analysis．The method combines two experimental parameters Can optimize affect parameters more scientific and reasonable， Use univariate and orthogonal experiment method polished quartz directly and material samples coated with a sacrificial layer．Finally it has compared the two polished results。The following conclusions Can be reached in this article： 1)Derived The kinetic model equation of ultrafast laser effecting optical material，as the energy density is changed，the etching depth of the material is changed non-linearly． 2)Using the orthogonal experiment method，it is educe that laser energy density shares max．weight in whole polishing process compared．Beca