基于白光干涉显微镜的偏摆式非球面轮廓测量技术研究-光学工程专业论文.docxVIP

优秀毕业论文 精品参考文献资料 硕士学位论文 硕士学位论文 基于白光干涉显微镜的非球面偏摆式轮廓测量技术研究 Abstract Contact probe in traditional swing arm profilometer may possibly damage aspheric surface and introduce measurement error because of its tip size．In order to measure asphere without contacting aspheric surface，non—contact optical probe based on white—light interferometric microscope was proposed。Scanning the sampling points on the outline to obtain their curvatures SO as to reconstruct surface profiles from curvature values． Firstly,the accuracy of curvature measured by white—light interferometric microscope was studied．Least squares calculation method was proposed to fit the 3D surface contour． Different radius of curvature(ROC)of standard spherical mirrors and probe which is used on profilometer were measured．The test results indicate that ROC measured by white-light interferometric microscope is accurate． Secondly,in order to generate reference results for non-contact swing element profilometry of asphere testing．Several surface contours of standard spherical mirror and aspheres were acquired by contact profilometer Taylor·Hobson PGl840．The results are of good coincidence of the nominal values of these mirrors。 Thirdly,non．contact swing element profilometry based on white-light interferometric microscope was proposed．Abscissa values of sampling points on surface profile were modified with coordinate compensation method while surface profile was reconstructed with integral method or fitting method according to curvature values and their abscissa values． Compared to the profile results of contact profilometer,the results measured by non—contact swing element profilometry show that ROC of standard spherical mirror is 49．97mm with PV of 95．2nm and RMS of 27．6nm in surface profile deviation while ROC of hyperboloid asphere at vertex is approximately 29．93mm with PV of 73．3nm and RMS of 2 1．6nm in surface profile．The results meas