铜铟镓硒CIGS光伏薄膜的磁控溅射及组成调控研究-电子元件与材料.PDF

第35 卷 第11期 电 子 元 件 与 材 料 Vol.35 No. 11 20 16 年11 月 ELECTRONIC COMPONENTS AND MATERIALS Nov. 20 16 新能源电池与材料专题 铜铟镓硒(CIGS)光伏薄膜的磁控溅射及组成调控研究进展 王凤起，符春林，蔡 苇，高荣礼 （重庆科技学院 冶金与材料工程学院，重庆 401331 ） 摘要: 铜铟镓硒（Cu(In Ga )Se , CIGS ）薄膜是目前备受关注的一种太阳能电池材料，磁控溅射是其重要的制 x 1–x 2 备方法。本文从溅射工艺（衬底温度、溅射功率、工作气压）和组成调控（硒含量、Ga 梯度）两个方面简述了关 于磁控溅射CIGS 薄膜的研究进展（尤其是对其光伏性能的调控），提出了提高CIGS 薄膜电池光电转换效率的建议 及研究方向。 关键词: 铜铟镓硒；太阳能电池；综述；薄膜；磁控溅射；工艺优化 doi: 10.14106/ki.1001-2028.2016.11.011 中图分类号:TM914.4 文献标识码:A 文章编号:1001-2028 （20 16）11-0049-05 Progress on magnetron sputtering and composition regulation of CIGS thin films WANG Fengqi, FU Chunlin, CAI Wei, GAO Rongli (School of Metallurgical and Materials Engineering, Chongqing University of Science and Technology, Chongqing 401331, China) Abstract : As a sort of solar cell material, copper indium gallium diselenide (Cu(In Ga )Se , CIGS) thin films x 1–x 2 attached much concerns, and the magnetron sputtering is an important method for its preparation. In this article, recent progresses on CIGS thin films using magnetron sputtering both at home and abroad are reviewed, especially the regulation on its photovoltaic properties. It includes optimization sputtering technology, such as substrate temperature, sputtering power, working pressure, and