电容式微机械加速度计处理电路研究微电子学与固体电子学专业论文.docxVIP

浙江大学硕士学位论文速度计系统各项性能都高于模拟式加速度计。 浙江大学硕士学位论文 速度计系统各项性能都高于模拟式加速度计。 关键词： 加速度计，电容检测， 同步解调， 微机电系统 Ⅱ 浙江大学硕士学位论文Abstract 浙江大学硕士学位论文 Abstract Accelerometer iS a sensor that used to meaurse acceleration．It call be used to meter intertial parameters including tilt angle，intertial force，impact and vibration． MEMS accelerometers have broad applications in fields such as inertial guidance， medical instruments，and consumer electronics． Capacitance sensitive MEMS accelerometer has been concemed because of it’S stability and high sensitivity．The performance of capacitance measurement circuit has a direct impact