创新型微纳米测量探头机理的研究测试计量技术及仪器专业论文.docxVIP

ABSTRACT‰e ABSTRACT ‰e kinds of innovative micro／nano measuring probe system will be introduced in this paper,which developed from the DVD pickup heact combining with the analysis about the optical theory,the mechanism structure and the electronics characteristic ofpickup head．It consists ofthe optical non-contact probe system，optical auto focusing probe system，optical touch trigger probe system．Focal ellor signal ofpickup head is achieved according to the Astignmtical principle，and that the optical non-contact probe s37stem with the measurement ranges of 2ttm and the measurement uncertainty of 1．1nm is obtained．ThiS probe system is imnmne to the variation of retiective ratios and curvature on the surfaces of samples via improvement of the signal process method．For augment ofthe measurement range ofprobe system，the systemic model ofthe voice coil motor in pickup head js investigated，and then the auto focusing non-contact optical probe system with 6001an measurement range is developed via the systemic recognition,the design and control of PID parameters and the hysteresis compensation of voice coil motor．At first,the measurement uncertainty ofthis probe system iS 0．2pm because oftbe influence ofhvsteresis and the method of signal process．The influence of hysteresis iS resolved associating the developed miniature Michelson interferometer with voice coil motor．Consequently the measurement precision of the auto focusing probe system is improved with the range of about lmm and the measurement uncertainty of beaer than 30nm．The optical touch trigger probe system is achieved with the basis ofthe high-precision characteristic ofoptical non．conteat probe system and a hi曲 sensitive trigger structure．The 3D spatial force model and pre-travel model ofthe probe system is established that the trigger force is less than 40／zN and山e repeatability on same dkecfion iS about 11．2nm．These three kinds ofprobe system dascribad above could be assembled hi曲-precision measurement instrum