掺铝氧化锌薄膜的相关特性研究凝聚态物理专业论文.docxVIP

郑 州 郑 州 大 学 硕 士 论 文 A b stra e t A b str a C t In recen t years，A I一d o P ed zin c ox ide (A Z O ) film s h as b een a h ot toP ie in tran sP a ren t e o n d u c tiv e f ilm f ie ld n o t o n ly b e e a u se o f t he ir c o m P a ra b le o P tie a l a n d e le c tri e a l P r o P e r tie s to IT O f il ln s，b u t a lso b e e a u se o f t he ir lo w e o st，a b u n d a n e e in natural resouree，and h igh stab ility in a h ydr ogen P lasm a env ironm ent. S uri五ee te x t ur e d A Z O f ilm ，a n a lte m a tiv e f ro n t e o n ta e t m a te ri a l o f S n O Z in 而 e ro c r y sta llin e silic o n f ilm so la r e e lls，h a s b e e n P a id m u e h a tt e n tio n to . In th is P a P e r， A Z O f ilm s w e re P re P a re d o n g la ss su b st ra te b y d ire e t eu r re n t P u lse reaetiv e m agn etro n sP u tteri n g (D C P 一sP u tteri n g ) an d d ireet eurr en t reaetiv e m agn etro n sP utterin g (D C 一sP u tteri n g )，resP ectiv ely. Th e effe ct o f d eP o sition P aram eters on th e s恤 ctural， electrie al， an d o Ptieal P r0 P erties o f A Z O film s w as inv estig ated sy stem atieally b y seann in g eleetro n m ieroseoP y (S E M )，x 一ray d i价 aetom etry (X R D )， f ou r P o in t P r o b e a n d U V - V IS 一IR sP e c t ro P h o to m e tr y， r e sP e e tiv e ly . T h e o P tie a l co n stan ts o f th e as一d eP o sited A Z O film s w ere fitted b y en v elo P m etho d (E M ) an d sP eetro seo P ie elliP so m etry (S E )，resP eetiv ely. hi ad d itio n ，th e as一d eP o sited A Z O film s w e re te x t ur ed b y s % N H 4C I a q u e o u s 50 1址 io n . A n d th e te x t ure P r o e e s s a n d te x t ure m e c h a n ism w e r e d e e P ly in v e stig a te d . T h e e f fe e t o f D C P 一sP u t te ri n g a n d D C 一sP u tt e ri