仿壁虎微米粘附阵列制备及柔性触觉关键技术精密仪器及机械专业论文.docxVIP

中国科学技术大学博士学位论文 中国科学技术大学博士学位论文 摘要 结合ICPBosch深刻蚀工艺和SF6各向同性刻蚀工艺，得NT高宽比大、尖端尖 锐的硅刚毛阵列。 针对粘附阵列对触觉感知的需求，研究了柔性传感器的混合集成技术，最 后采用柔性电路版和倒装焊技术实现了三维力传感器的柔性化。建立了E型膜 片的力学模型，进行了有限元和输出信号分析，得出了E型膜片对三维力的响 应。然后进行了传感器单元的工艺制造和标定实验及传感器阵列组装和触觉图片 采集显示。最后初步实现了柔性触觉传感器和粘附阵列的集成，为爬壁机器人提 供了具有触觉感知功能的粘附阵列。 关键词仿壁虎粘附阵列；深刻蚀技术；微流体；MEMS技术；三维力传感器： 柔性传感器 Ⅱ Ph．D Ph．D Dissertation ofUniversity ofScience and Technology ofChina Abstract ABSTR ACT 11蛇gecko adhesion has many advantages，such as the large adhesion force， adaptive to rough surface and materials，harlnless to the contact surface，self-cleaning and durability．Biomimetic gecko adhesive arrays are suitable for adhesive sI矾K血l∞s of wall climb robots．In order to efficiently control the contact force during the attachment and detachment procedure between the robot and the wail surface，it is needed to integrate the adhesive arrays with the flexible tactile sensoL The most developed biomimetie gecko adhesive arrays are single layer sU31ctmes of micro polymer arrays made by mold method．Without the tactile function,the biomimetic adhesive array could not effectively control the adhesive force．However, the gecko skin receptor could be sensible to mechanical stimuli．So，the main aim of this paper is the fabrication ofbiomimetie micro adhesive array integrated with taotile function．We analyzed the effect of fabrication parameters and established a viscosity polymer tube flow model．皿e hybrid integration of a flexible sensor is studied．and the flexibility of the three-dimensionai force sensor is developed by using flexible PCB and flip chip assembly technology． We adopt the mold method to fabricate the micro polymer adhesive array after fml investigation of the current fabrication methods．The silicon micro hole array made by ICP Bosch dcep etch technology is used as template，and the polydimethylsiloxane(PDMS)is injected，hardened and demolded．Flexible adhesive array with large area is therefore obtained with good adhesive force．The fabrication processes is stud