测控技术与仪器专业英语unit-3.ppt

* Integration of micromachining and microelectronics 微机械和微电子的集成 Increasing the performance and reliability and reducing the cost of electronic circuits through increased integration are standard expectations for semiconductor technology. In the area of semiconductor sensors, however, that integration has been limited to Hall-effect and optoelectronic devices. 译为：提高性能和可靠性，并通过提高集成度降低电子电路的成本，是标准半导体技术的最终期望。然而，在半导体传感器领域中，这种集成受到霍尔效应和光电子设备的限制。 * The recent combination of micromechanical structures, sensing elements, and signal conditioning is the beginning of a new chapter in sensor t