用于AgGaS2晶体生长的石英安瓿镀碳工艺研究.pdf

2007 6 () Jun., 2007 21 2 Journal of anchang Hangkong University( atural Science) Vol.21 o.2 AgGaS 2 , , (南昌航空大学材料科学与工程学院, 江西 南昌 330063) [ ] AgGaS ; ; ; 2 [ ] , 600 ml/min, 1060e ~ 1100e , 30 min, 11h 4 - 2 AgGaS , , , 6@ 10 cm 2 [ ] O782; T 3041053 [ ] A [ ] 1001- 4926( 2007) 02- 0072- 04 Study of the carbon coating on quartz ampoules for AgGaS2 crystal growth ZHA G Jian- jun, WA G Gao- chao, JIA GHong- liu ( School of Material Science and Engineering , Nanchang H angkong Univ ersity , Nanchang 330063, P . R . China) Key words:AgGaS crystal; carbon coating; technology; carbon films coating analysis 2 Abstract: The carbon films coated on the inner surface of quartz ampoules in different technological conditions were tested andanalyzed by mi- croscope and thrust analytic instrument. The morphology and etching pits of crystals, which grew in these ampoules, were also observed. The effect of the technology parameters on the surface topography of carbon films and the binding force between carbon films and the inner surface of quartz ampoules were studied. And the preferable technical parameters of carbon coating are obtained, i. e. the gas- flow rate of 600ml/ min, carbon coating temperature of 1060e ~ 1100e , the carbon coating time of 30 minutes and the cooling time of 11h. Under the condi- tion, the thickness of carbon films is more uniform and its binding with quartz ampoule is much stronger. Moreover the as- grown AgGaS2 crystal is transparency, it has smoother