一种基于剪切力的距离控制方法在扫描近场光学显微镜-光学精密工程.PDF

6 3 Vol.6,No. 3 1998 6 OPTICS AND PRECISION ENGINEERING June, 1998 王　昕　　王克逸　　黄文浩　　林　松 ( 中国科学技术大学精密机械与精密仪器系　　合肥230026) , , , 4 4 1 (SNOM) , (n ) ( 0- 50 ),, n [2] , , [ 1] , [3] ( 50 ) ,, n , [2] ,nW , , , : 1997- 11- 12 : 1998- 02- 26 3 : 75 ,, :( 1) : SNOM STM ,, [4] (2):, ,, ,, , , [2] , , , , (3): ,, ,, , [5] ,, , 2 2. 1 PST M ,1 (a) ,X YZ 3 , , , (1 ) , ,(0. 3 ) , ,1(b) [6] ,CCD ,CCD . 1( ) . 1( ) Fig a Sche atic diagra of the distance control unit be- Fig b Sche atic diagra of the tween the tip and the sa ple shear-force easure ent 2. 2 EI , n = A 4 , :,I : ,E :, l 76 6 1 3 l:,,I = bh , b,h ,