基于ZnO薄膜的电声特性分析-光电信息工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract ZnO is a classic Ⅱ-Ⅵ semiconductor, It has been investigated extensively because of its interesting electrical, optical and piezoelectric properties making suitable for many applications such as solar cell window,transpatent conductive films,bulk acoustic wave devices and light emitting diode(LED). We successfully fabricated zinc oxide(ZnO) based film bulk acoustic resonator by magnetron sputtering method. This paper study the Piezoelectric properties and Acousto-optical properties of ZnO and LiNbO3. The background of transient thermoelastic analysis i