常压烧结法制备ZnO陶瓷靶材.PDF

第 25 卷第 6 期 中国有色金属学报 2015 年 6 月 Volume 25 Number 6 The Chinese Journal of Nonferrous Metals June 2015 文章编号：1004-0609(2015)06-1625-09 常压烧结法制备ZnO 陶瓷靶材 孙文燕，王日初，王小锋，彭超群 ( 中南大学 材料科学与工程学院，长沙 410083) 摘 要：采用凝胶注模成型技术制备 ZnO 陶瓷坯体，并在较低温度下常压烧结后获得相对密度达 98.6%、晶粒尺 寸为 1.35 μm 的陶瓷靶材，研究工艺参数对ZnO 陶瓷靶材的相对密度、晶粒生长和电阻率的影响。结果表明：ZnO 陶瓷靶材的相对密度随烧结温度升高而增大，在 1050 ℃时达到最大值。适当增大升温速率或延长保温时间都有 利于提高其相对密度。晶粒尺寸随升温速率的升高而减小，随保温时间的延长而增大。提高烧结温度和增加保温时 −2 Ω·cm)。 间都可降低ZnO 陶瓷靶材的电阻率。ZnO 陶瓷靶材经 1400 ℃烧结 3 h 后，获得的电阻率最小(为 1.75×10 关键词：ZnO 陶瓷靶材；凝胶注模；常压烧结；相对密度；晶粒尺寸；电阻率 中图分类号：TN43 文献标志码：A Fabrication of ZnO ceramic target by conventional sintering SUN Wen-yan, WANG Ri-chu, WANG Xiao-feng, PENG Chao-qun (School of Materials Science and Engineering, Central South University, Changsha 410083, China) Abstract: ZnO ceramic target with the relative density of 98.6% and grain size of 1.35 μm was fabricated by gelcasting and conventional sintering at low temperature. The effects of processing on the relative density, grain growth and electrical resistivity of ZnO ceramic target were studied. The results show that the relative density of ZnO ceramic targets increases with increasing the sintering temperature, and reaches the maximum value at 1050 ℃. The relative density of ZnO ceramic targets increases with increasing the heating rate or duration time. The grain sizes decrease with increasing the heating rate, while increase with increasing the duration time. With increasing the sintering temperature and duration