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20 11 仪 表 技 术 与 传 感 器 20 11
1 In strum ent T echn iqu e and Sen sor N o1
MEM S
于 玮, 封维忠, 武建军
( , 210037)
: 介绍了一种基于热对流式加速度传感器的二维高精度数字水 仪的设计方案从数学模型入手, 推导了倾角测量算法
采用硬件抑制软件滤波的方法, 最大限度地降低了外界干扰, 解决了测量大角度时的零点漂移问题研究结果表明: 该
仪器可以进行多种高精度的倾角测量
: M EM S; 数字水 仪; 微控制器; 抗干扰
: TP2 12 9 : A : 1002 - 1841( 20 11) 01- 0024 - 03
D igital In clinom eter Based onM EM S A cceleration Sensor
YU W e,i FENG W e i zhong, WU J ianjun
( College of Inform ation Sc ien ce and T echnology N anjing F ore stry U n iversity N anjing 210037 Ch ina)
A bstract: Th is pap er descr ibed a design so lution o f tw od mi en siona l and h ighprecision dig ital inc linom eter b ased on therm al
acce lerom eter Starting from m athem atical model, it ca lcu la ted the a lgo rithm of ang le m easurem ent Out side interference cou ld be
m in mi ized in the m ethod o f suppression by ha rdw are and f ilte ring by so ftw are A nd it so lved the prob lem th at zero w as dr ifting
w hen large ang les w ere m easured R esults show th at the in strum ent can be used fo r va riou s h ighprec is ion ang le m easurem ent
K ey w ord s: M EM S; d ig ita l inc linom eter; M CU; anti jamm ing
0 Y , . O
, OH, O AB , C.
[ 1]
, OA B
, OCH [ 3- 4]
M EM S
1
M XC62025G , X
Y 2
, 1 ,
, 4 2
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