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-- : [ ] --(SF6) SF6SF6 SF6 SF6SF6(0.2%)/N21.6 kWH2/ O2/SF6, H2O(g)/SF6, H2/SF6O2/SF65/5/1, 5/1, 5/15/1SF6 51.0%, 49.2%, 48.9%36.0%SF6SF6 SF6 F2SiF4H2HFO2SO2F2, SOF2, SOF4SO2 NOxH2O2SO2F2, SOF2SOF4SO2 700 torrHFSF6HF Ca(OH)2SO2F2SOF2N2 H, N2SF2SF6H2/SF6 [ ] In this study, a microwave plasma with additive and absorbent for treating sulfur hexafluoride (SF6) was used to evaluate the effects of additive, inlet concentration of additive, applied power, operating pressure, inlet concentration of SF6 and total flow rate on the conversion of SF6 and product distributions. Moreover, the removal performances of toxic byproducts through various absorbents were also evaluated. In addition, optical emission spectroscopy was utilized to identify the varieties of the main active species in the plasma zone. The experimental results showed that the addition of additives and the elevation of power increased the SF6 conversion. The higher SF6 conversions were achieved, reaching 51.0%, 49.2%, 48.9%, and 36.0% at the H2/O2/SF6, H2O(g)/SF6, H2/SF6, and O2/SF6 ratios were 5/5/1, 5/1, 5/1, and 5/1, respectively, at 700 torr and 1.6 kW. In addition, the reduction of operating pressure, total flow rate or inlet concentration of SF6 could raise the conversion of SF6. The main product was F2 with trace amount of SiF4 when added additive. In addition, toxic HF and sulfur depositions were also found when H2 was added. The addition of O2 yielded SO2F2, SOF2 and SOF4, as well as trace amount of SO2 and NOx. When H2 and O2 were added simultaneously, the formation of SO2F2, SOF2, and SOF4 were suppressed to result in SO2 was the only major product (except F2), to reveal that a higher conversion and fewer toxic