基于声表面波的拉曼型声光移频器的优化设计与仿真-仪器科学与技术专业论文.docxVIP

重庆大学 重庆大学硕士学位论文 英文摘要 PAGE PAGE IV designed using effective index method; ③ The main process of frequency shifter is proposed. The interdigital transducer (IDT) and reflectors are fabricated on quartz substrate; SiO2 films are fabricated on quartz to form the optical waveguide by PECVD and dry reactive ion etching (RIE); Two type prototype of the SAW Raman-type acousto-optic frequency shifter are developed; ④ The performances of SAW acousto-optic frequency shifter prototype are tested and analyzed. The resonance characteristics of the SAW resonator are tested using network analyzer; The test platform of the frequency shifter is built and characteristics of the frequency shifter prototype are tested; The application performances of the acousto-optic frequency shifter in the acceleration sensor are also tested. The test results show that the frequency shifter developed can achieve design requirements of the acousto-optic acceleration sensor. Key words：SAW，Acousto-optic effect，Acousto-optic frequency shifter，Raman diffraction，acceleration sensor 重庆大学硕 重庆大学硕士学位论文 目 录 目 录 中文摘要I 英文摘要 II HYPERLINK \l _bookmark0 1 绪论 1 HYPERLINK \l _bookmark1 1.1 引言 1 HYPERLINK \l _bookmark2 1.2 声光移频器简介 1 HYPERLINK \l _bookmark3 1.3 声光移频器国内外研究现状 2 HYPERLINK \l _bookmark4 1.4 研究目的及主要内容 7 HYPERLINK \l _bookmark5 1.5 小结 8 HYPERLINK \l _bookmark6 2 基于 SAW 的拉曼型声光移频器的理论分析 9 HYPERLINK \l _bookmark7 2.1 声光互作用 9 HYPERLINK \l _bookmark8 2.1.1 声光衍射 9 HYPERLINK \l _bookmark9 2.1.2 谐振器耦合模型 10 HYPERLINK \l _bookmark10 2.2 基于 SAW 的拉曼声光移频器 13 HYPERLINK \l _bookmark11 2.2.1 基本结构与工作原理 13 HYPERLINK \l _bookmark12 2.2.2 原理验证 15 HYPERLINK \l _bookmark13 2.3 基于 SAW 的拉曼声光移频器的方案 18 HYPERLINK \l _bookmark14 2.3.1 ZnO-SiO2-Si 多层结构的拉曼声光移频器 18 HYPERLINK \l _bookmark15 2.3.2 石英基 SAW 拉曼型声光移频器 20 HYPERLINK \l _bookmark16 2.4 小结 23 HYPERLINK \l _bookmark17 3 基于 SAW 的拉曼型声光移频器的结构设计 24 HYPERLINK \l _bookmark18 3.1 SAW 谐振器的设计 24 HYPERLINK \l _bookmark19 COM 参数的提取 25 HYPERLINK \l _bookmark20