基于陶瓷的无线无源高温压力与温度传感器的设计、制备及测试-测试计量技术及仪器专业论文.docxVIP

中北大学学位论文 中北大学学位论文 中北大学学位论文 中北大学学位论文 carbon membrane as sacrificial layer which improved the flatness degree of sealed micro-cavity greatly and enhanced the sensitivity of the sensor to achieve pressure measurement in high-temperature region perfectly. The temperature sensor selected LTCC materials as substrate, and a kind of high Curie point ferroelectric ceramic as a dielectric material that sense to temperature, and low-temperature ceramic technology to prepare capacitor cavity temperature sensitive LC structure, filled the sacrificial layer similarly. The specific research as follows: Firstly, a detailed theory analysis of the capacitive high-temperature pressure sensor prepared with no-co-fired was introduced, whose theory core is: the space of capacitor plate in sensor becomes smaller when some pressure applied on it, which resulted in the capacitance value changes, and then caused change of the resonant frequency; The theoretical core of temperature sensor depended on the ferroelectric ceramic material, which is sensitive to temperature, and the dielectric would change when the outside temperature alters, which lead to changes in the capacitance, and give rise to change in the resonant frequency. So the temperature and pressure parameters were obtained by coupling frequency variation. As to no-co-firing high-temperature pressure sensor, according to the LC resonance principle and the wireless passive detection theory of RF signals we analysed the capacitance change of sensor in the pressure; Designed the high temperature pressure sensor structure model and calculated design parameters; The sensor samples were prepared with no-co-firing technology; We also built a test platform uniform, with which we can complete pressure measurement in high temperature and normal temperature environment and make corresponding analysis of results. In terms of the ferroelectric ceramic temperature sensors, the design idea based on the principle of LC resonant was introduced, whi