基于微桥结构的微加热器制作工艺研究-光电信息工程专业论文.docxVIP

II II Abstract Microbridge are mainly used in micro-heater,infrared detectors and infrared emitter; Microbridge can reduce the thermal conductivity and energy consumption,improve the temperature of micro-heaters; Or enhance the detectivity of infrared detectors; By using microbridge,infrared emitter can increase the radaition power. As a useful platform, microbridge can be used to produce more efficient MEMS devices. This thesis aims to develop silicon-based micro-heater chip with 2×2 microbridge heating elements.Design and fabrication of microbridge array were investigated,the detailed contents are listed below. Through the study of principle of the wet etching of silicon and a lot of corrosion of experiments,the characteristics of wet etching were analysized and the microbridge structures were designed to be compatible with the wet etching processes. The structure characteristics of microbridge were analyzed systemtically.In accordance with the principle of structural design and the conditions of laboratory ,the fabrication processes are designed for the micro-heater. Finite element modeling by using ANSYS software was conducted to simulate the thermal and mechanical properties,which provide a basis for the understanding of micro-heater. Fabrication process for micro-heater based on microbridge structure were investigated . Wet etching of silicon and thin film fabrication were mainly studied .The optimization process for anisotropic and isotropic wet etching are obtained for the microbridge after a large number of experiment;And the better performance of the film materials are obtained by studying film fabrication parameters. Afterwards the micro-heater was successfully complished. Key words：microbridge anisotropic etching isotropic etching film stripping micro-heater PAGE PAGE IV 目 录 摘 要 I AbstractII 1 绪论 1.1 MEMS 技术MOEMS 技术 (1) 1.2 微桥工艺的发展历程 (3) 1.3 微桥的发展方向 (6) 1.4 本文的主要工作 (6) 2 微桥的湿法腐蚀工艺 2.1 单晶硅硅湿法腐蚀的几何理论基础 (7) 2.2 单晶硅的各向异性腐蚀 (9) 2.3 单晶硅的各向同性腐蚀 (17) 2.4 本章