用于CVD气相沉积法的管式炉.PPTXVIP

用于CVD气相沉积法的管式炉 ——石墨烯应用领域;Company history;Advanced Manufacturing Park;Better temperature uniformity than a chamber furnace Can be used with an inert atmosphere, hydrogen or under vacuum More economical for heating small samples Can be used horizontally and / or vertically Rotating and multi-zone models available increased flexibility Cleaner – can be dust free in operation ;Split tube furnaces;Normal Tube furnace;MTF tube furnace with additional slide-in work tube;MTF tube furnace with radiation shields for use with vacuum;MTF tube furnace with insulation plugs and gas tight end seals;;The t