光学表面分析仪的信号采集与处理系统研究物理电子学专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 － －II－ Abstract Optomechatronics is a cluster technique that integrates optics, mechanics, electronics, information processing and control, and special software. Combinations of the optical technology and the mechatronics, which make optical detection more rapid, accurate and intuitive, improve the application and development of the optical surface measurement. This dissertation develops a multi-channel optical detection apparatus. With the help of the optomechatronics technology, the apparatus integrates several common methods. By improving the light path system and combining the sensor subsystem and the information processing subsystem of traditional mechatronics, this apparatus can process and detect different types of defects. That is difficult to achieve for the other detection apparatus. Based on the multi-channel optical system, data acquisition device and the high precision data analysis-processing software, this apparatus can detect different parameters and defects of samples automatically, and the efficiency of detection is improved. The researches are presented as following: The optical measurement system designed in this dissertation integrates ellipsometry measurement, light reflex measurement and optical interferometry measurement. Through the improvement of software algorithms, measurement precision is enhanced. Experiment results verified the feasibility of the optical system. Based on the optomechatronics technology, the data acquisition and transport subsystems are designed. The photoelectric sensor is used to convert the optical information of samples into electrical signals. The data transfer devices provides a data channel for the high-speed acquisition and real-time control. The CMOS image acquisition and transmission system, which based on USB interface, is designed to ensure accurate data acquisition. The system funtions are called in the application software to － －III－ control hard