原子力显微镜中微悬臂梁分布参数系统的-控制理论与应用.PDF

32 3 Vol. 32 No. 3 2015 3 Control Theory Applications Mar. 2015 DOI: 10.7641/CTA.2015.40589 Hammerstein , (, 410012) : (atomic force microscope, AFM), , . ; Karhunen-Love(K–L), . , Hammerstein, , ; , . , . : ; ; Hammerstein; ; : TP18 : A Hammerstein model for distributed parameter system of micro-cantilever in atomic-force microscope XU Yun-yang , XU Kang-kang (State Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha Hunan 410012, China) Abstract: To improve the accuracy of the distributed-parameter model of the micro-cantilever in an atomic-force mi- croscope (AFM), we propose a modified model which contains the nonlinear spatial-temporal properties. On this basis, the structure of the controller is simplified and a nonlinear compensation term is added to correct the traditional distributed parameter model. Next, the Karhunen-Love (K–L) decomposition method is applied to extract the dominant spatial basis function of the system, achieving the space-time decomposition. Then, a temporal Hammerstein model is identified by the temporal coefficients obtained from the decomposition and the input signal, which transforms the infinite dimensional partial differential equation model into the finite-dimensional ordinary differential equation model, making it possible to design the controller without considering the space coupling. Finally, we use the leas t-squares-support-vector-machine algorithm and the singular-value decomposition method to identify the parameters of the model. Simulation and experi- menta