激光冲击波驱动无阀微泵的研制-机械电子工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract Micropump has been deeply researched with the development of micro fluid system, which is the principal and power component of micro fluid system. Traditional micropump driving methods always have disadvantages like high power consumption， difficult to fabrication and miniaturization, to realize the characteristics of low cost ， simple manufacturing and capable of miniaturization, a novel actuating approach basing on the mechanical effect of laser shock waves is studied in this paper. Firstly，The working principles of laser shock wave and laser driven