集成电路铝金属化工艺的缺陷研究-软件工程专业论文.docxVIP

目录 1 文献综述 1 1.1 集成电路技术的发展及展望 ···························································· 1 1.2 铝金属化工艺综述 ·········································································· 2 1.2.1 金属化工艺中铝材料的应用 ··················································· 2 1.2.2 金属化工艺中铝硅合金的应用 ················································ 3 1.2.3 金属化工艺中铝铜合金的应用 ················································ 4 1.2.4 阻挡层金属钛及氮化钛的应用 ················································ 4 1.2.5 金属填充塞钨的应用 ······························································ 5 1.2.6 铝金属化工艺流程 ············