微流体生医晶片之电性量测系统与注射系统之设计与制作.DOC

微流體生醫晶片之電性量測系統與注射系統之 設計與製作 Design and Fabrication of Contactless Capacitive Detector System and Injection System for Microchip Capillary Electrophoresis 研究生：吳銘富 Ming-Fu Wu 指導教授：傅龍明 Lung-Ming Fu 【摘要】 本研究利用微機電製程整合真空融熔結合技術，設計製造出一套應用電性量測之微流體生醫晶片系統，應用於細胞或是其他生物樣本之偵測。本研究所採用的製程是採用濺鍍及金屬剝離法（lift-off）來定義出晶片上偵測電極的圖形，利用整合於晶片的微型電極，量測微管道內因為偵測物通過量測區時，所造成微小的電容抗及電阻抗的變化。並且更進一步的將製造出來的晶片利用真空融熔結合技術，完成了一套便於作電性偵測的完整系統。本研究也完成了使用高解析注射技術上在微電泳晶片內注射樣品區間的實驗。 兩種微流體晶片注射系統被提出來討論，使用傳統的十字形和U形注射系統的與一個漸擴管相結合的新式注射系統可以注射形狀良好的樣品區間到分離管道中並偵測。在樣品注射和分離期間整個系統被透過電驅動適當的操作控制，在微流體管道中形成有著多種的特徵的樣品區間（sample plug）。 在這項研究中所發展出的這些新式注射技術有一種令人讚賞的能力，就是能夠提供在高品質，高產量的化學分析應用和在整個微全分析系統（μ-TAS）的領域應用。 關鍵詞：電性量測、微型電極、金屬剝離法、真空融熔結合、高解析注射技術、微全分析系統、樣品區間 【Abstract】 The current study proposes a simple and reliable method utilizing microfabrication technologies to fabricate a capillary electrophoresis (CE) chip integrated with contactless capacitive detectors. The off-channel detector electrodes mounted parallel to the flow direction are deposited by Au sputtering and patterned by ‘lift-off” processes. Using vacuum fusion bonding, the substrate is sealed on a bottom substrate. The measured capacitances between the electrodes in the side channels vary as different samples and ions pass the detection area in the CE channels.This paper also presents an experimental investigation on the use of high-resolution injection techniques to deliver sample plugs within electrophoresis microchips. Two novel injection microfluidic chips are proposed, which employ conventional cross-shaped and U-shaped injection system combined with an expander to deliver high-quality sample plugs for detection in separation channel. The valving characteristics on microfluidic devices are controlled through appropriate manipulations of the electric potential strengths during the sample injection and separation steps. These novel injection techniques developed in this study has an exciting potential for use in high-quality, high-throughput chemical analysis applications an