空心阴极激光器放电理论和实验研究 物理电子学专业毕业论文.docx

华中科技大学博士学位论文and 华中科技大学博士学位论文 and attributes t11is effect to the inhomogeneous distribution of electric field and ion flux at the cathode surfaces．Moreover，the effect of magnetic field(parallel to the electric field ● in the cathode dark space)has been modeled and a conclusion is driven：the parallel 、 magnetic field can confine the fast electrons in the negative glow and hence enhance the discharge current density．Such conclusion is afterward demonstrated by the experiment． ．The capacifively coupled radio—frequency discharge is also studied．A self-consistent model，which is a combination of two—electron group model and a fluid mode for ions，is developed．Special attention is paid to the contribution of secondary emission electrons to the overall ionization and discharge characteristics．The model has demonstrated that the 11igh current rf discharge is analog to the hollow cathode discharge．The impedance matching network and the impedance characteristics are experimentally investigated．An analysis to the longitudinal distribution of voltage along the electrodes as well as the spontaneous spectrum of the discharge show that the fail to laser excitation is mainly due to the large variation of voltage along the electrodes，which easily causes arcing under the high rf input power,and the lack of sufficient metal atom density． Keywords：Hollow cathode discharge，Cathode spuRering，RF discharge， Metal ion Iaser,Self-consistent model 华中科技大学博士学位论文第一章 华中科技大学博士学位论文 第一章 绪论 §1．1用于金属离子激光器的激励方式的发展概述 自从1969年第一次在实验中实现He—Cd空心阴极激光器以来，迄今为止已经在 几十种金属中得到了多达400条激光谱线，其频谱覆盖了220～2000nm的宽广范围。 空心阴极激光器的连续波功率已达到1w，而在800～2000nm范围的脉冲功率(持续 时间i00IZ s)超过了5w“1。空心阴极离子激光器由于在紫外波段(320nm)能够获得 数百毫瓦的连续输出，因而具有非常重要的应用价值：可用于泵浦连续紫外染料激光 器；利用其与红外染料激光的混频来实现紫外的可调谐激光输出；用于荧光激活细胞 的分类；以及用于激光光刻、集成光电元件制作等领域。 在金属离子激光器中，目前主要的激励方式为放电激励。粒子数反转主要是利用 放电中的高密度的缓冲气体离子与游离的金属原子之间的共振电荷转移使激光上能 级大量布居而产生的。研究表明“3，要产生毫瓦级的激光输出，激光增益区的离子密 度和金属原子都要达到10”m～，因而如何产生足够高的金属原子密度和缓冲气体离 子密度的就成为金属离子激光器的关键所在。 一般情况下，金属都处于固态，金属原子由于金属键的作用而处于束缚状态。要 使金属原子参加电荷转移反