离子注入法制备的金属纳米颗粒的同步辐射研究-物理学专业毕业论文.docxVIP

AbstractIn Abstract In this paper,we illustrate the significant value of ion implantation in the field of semiconductor,and it to fabricate single metal nanoparticles and bimetallic nanoparticles by controlling the concentrations，injecting elements and doping ratio． Based the introduction of the working principle of the testing technology,we used UV-vis spectrum，atomic force microscopy,and synchrotron radiation fluorescence XAFS to study the doped materials under different injection parameters．And through the testing，we observed the optical absorption，surface morphology and local microstructure of the samples．Meanwhile，the crystal structure database，FEFF calculation and the of IFEFFIT software introduced and summarized in detail for the data processing of fluorescent XAFS． Through the test and analysis，the oscillation signal and the fine structure information of the injection element are obtained，including the composition of the nearest neighbor elements，the coordination number,the atomic distance，and The optical properties of doped materials were tested by UV-vis fluorescence spectrum and synchrotron radiation vacuum ultraviolet fluorescence spectroscopy． Based the analysis above，we found the change law of the local microstructure and optical properties of the doped materials，SO as to provide scientific basis for the production and application of this kind of materials in the semiconductor doping process． Keywords：nanoparticles；ion implantation；synchrotron radiation；XAFS；VUV 万方数据 目录摘 目录 摘 要 ．I Abstract ． ． II 第l章绪论 1 1．1金属纳米材料 ．1 1．2半导体掺杂技术 ．1 1．2．1热扩散技术 2 1．2．2离子注入技术 2 1．3同步辐射光源 ．3 1．4晶体结构数据库 ．4 1．4．1无机晶体结构数据库 4 1．4．2有机晶体结构数据库 5 1．5 FEFF{十算 ．．6 1．6本文主要内容 ．6 第2章金属纳米颗粒的制备与测试技术 8 2．1样品制备 8 2．2紫外可见分光光度计 ．8 2．2．1紫外可见分光光度计工作原理 8 2．2．2分光光度计的操作流程及注意事项 一8 2．2．3紫外可见分光光度计谱学测试 9 2．3原子力显微镜 10 2．4 SRIM模拟程序 1 0 2．5紫外可见荧光测试 ll 2．6同步辐射技术 12 2．6．1真空紫外荧光光谱 ．1 2 2．6．2 X射线吸收精细结构 ．14 2．7本章小结 1 6 III 万方数据 第3章金属纳米颗粒的精细结构与光学性质表征 第3章金属纳米颗粒的精细结构与光学性质表征 ．．1 7 3．1单金属纳米颗粒的同步辐射EXAFS研究 17 3．1．