电容式微位移测量仪的设计.docVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨理工大学学士学位论文 - PAGE II - - PAGE II - 电容式微位移测量仪的设计 摘 要 在工业计量中有很多需要检测的参数与位移量的变化有关，如力、流量、温度、速度、振动、密度、粘度等。所以位移的测量在工业甚至其他一些领域显得尤为重要，而电容测微仪作为一种非接触式的，能够精确测量微小相对位移、微振动和微小尺寸的仪器，具有温度稳定性好、测量范围大、测量精度高、动态响应好、结构简单等一系列优点，它的相对变化量大，能在特殊环境下工作，如在强光照射下、在核辐射条件、过载冲击震动环境等。所以在航空、航天、工业生产加工、超精密测量等领域中具有广泛应用。 本文对电容测微仪的工作原理做了系统地、详尽地论述，并在此基础上，设计了以运算放大检测法为基础的测量电路，完成了硬件系统总体结构的研制，系统各个结构部分电路图设计及过程介绍。随后将通过传感器由位移量转化而成的电容量输出并转化成电压量；然后选用MAX1166作为将模拟量转换为数字量的A/D转换器，最后采用单片机C8051F020对测量系统进行单片机软件控制，实现了数据的采集和滤波、键盘参数设置、数据显示等。最后完成本次设计。 关键词　电容传感器； 微位移测量； 运算放大器检测 The design of Capacitive micro-displacement measurement instrument Abstract There are many in the industrial measurement and the need to detect the parameters related to changes in the amount of displacement, such as power, flow, temperature, speed, vibration, density, viscosity. So the measurement of displacement and some other industrial areas is particularly important, which capacitance micrometer as a non-contact precision measurement of small relative displacement. And the small size of micro-vibration apparatus, with temperature stability, wide measurement range, high accuracy, good dynamic response, simple structure and a series of advantages, it is the relative change in volume, can be used in special circumstances, such as in aviation, in bright light, the radiation conditions, overload shock and vibration environment. In this paper, capacitance micrometer works and its key technology to do a systematic and detailed exposition. On this basis, the design of the operational amplifier detection method based on measuring circuit, the completion of the hardware systems architecture development, system circuit design of various structural elements and operating principle and process introduction. Then transformed by the displacement sensor made by the capacitance into a voltage output and capacity; then use MAX1166 as the analog to digital conversion of the AD converter. Finally, we use single-chip microcontroller C8051F020 meas