压力传感器论文.docVIP

第一章 引言 ABSTRACT PAGE 1 摘要 = 1 \* ROMAN I 摘要 压阻型扩散硅压力传感器以其低价格得到广泛应用。 压力传感器的核心是扩散硅电阻桥，智能压力传感器应用单片机技术采集数据、处理并输出显示结果。扩散硅的压阻系数是温度的函数，所以存在灵敏度温漂，而影响温度的因素是多方面的:测量环境的变化，测量电路产生的热量的影响等等，所以要想得到比较精确的压力值，必须对压力传感器进行校正。 压力传感器的零点存在热漂移、电漂移和时间漂移，减小压力传感器的热零点漂移的措施是各力敏电阻的电阻值及其温度系数的相等性。本论文应用曲线拟合方法，神经网络算法和多项式拟合的规范化方法校正零点，降低成本且精确度提高. 压力传感器的压力灵敏度与压阻系数成比例关系，而压阻系数是温度的函数，所以非线性补偿的实质是消除温度对灵敏度的影响。可应用的方法很多:二极管补偿法，恒流源补偿法，热敏电阻补偿法等。 本论文根据压力传感器零点补偿与非线性补偿原理，设计出了测量压力传感器的硬件电路，但是由于自身的稳定性其测量结果仍存在误差。 关键词:热零点温漂，灵敏度温漂，电漂移，压力传感器 ABSTRACT = 2 \* ROMAN II Abstract Pressure sensors are widely used because of a low Price. Silicon resistance is the core of Pressure sensor，an intelligent Pressure sensor acquires， processes data by using microProeessor technique. The Piezoresitive coefficient of silicon is a function of temperature and so the offset drift and sensitivity thermal drift occur. The factors affecting on temperature are various: the change of measurement environment，the heat of the measurement circuit and so on. If we want to get accurate Pressure values，they must be revised. The sensor offset is govemed by its thermal drift，electric drift and electric drift，so eliminating the offset thermal drift in the measurement of sensor needs to keep the values of resistance and temperature coefficient for different resistor strips to be equal each other. The pressure sensitivity is proportional to the piezoresitive coefficient and the latter is a function of temperature, so after eliminating sensitivity thermal drift，the nonlinearity can be substantially compensated. The methods，diode compensation，constant current compensation, thermal sensitive resistor compensation and so on are widely used. In addition，based sensor thermal drift and nonlinearity principle，this paper has designed intelligent sensor hardware circuit. though the result has still a little error. 目录 = 3 \* ROMAN III 目录 TOC \o 1-3 \h \z \u 第一章 引言 1 1.1 “气缸疲劳性实验”中压力传感器的使用 1 1.2 压力传感器的发展历史及现