声表面波气体传感器及阵列化分析-光学工程专业论文.docxVIP

ABSTRACT ABSTRACT SURFACE ACOUSTIC WAVE GAS SENSOR AND ITS SENSOR ARRAY TECHNOLOGY ABSTRACT As much attention has been paid to chemical weapons in all over the world, many countries such as USA and the Netherlands have put a lot of resource in researching the toxic agents sensors and even have put the sensors in anti-terrorism. However, the domestic research of surface acoustic wave (SAW) based chemical sensors to detect chemical agents just starts from the very beginning. Particularly, there is a lot work to do in the field of SAW sensor array. The paper firstly explains the principles of SAW