一种闭环自激式驱动的硅微机械电场传感器electricfi资料精.pdfVIP

第 31 卷第 11 期 电 子 与 信 息 学 报 Vol.31No.11 2009 年 11 月 Journal of Electronics Information Technology Nov..2009 一种闭环自激式驱动的硅微机械电场传感器 熊幼芽①② 彭春荣① 夏善红① ①(中国科学院电子学研究所传感技术国家重点实验室 北京 100190) ②(中国科学院研究生院 北京 100039) 摘 要：该文提出了一种闭环自激式驱动的微型电场传感器方案。利用自动增益控制的原理实现闭环自激驱动，使 得微传感器能够始终工作在谐振状态，且振动幅度保持稳定。用 matlab-simulink 工具对系统进行了仿真，结果表 明，当传感器的谐振频率发生 0.5%的漂移时，系统可以重新捕捉并锁定到新的谐振频率，和开环驱动方案相比， 传感器振幅的衰减度从 30%降低到 0.1%之内，灵敏度从缩减 50%改进到缩减 0.1%之内。 关键词：微型电场传感器；闭环；自激驱动电路 中图分类号：TP212.1 文献标识码：A 文章编号：1009-5896(2009)11-2776-05 Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit ①② ① ① Xiong You-ya Peng Chun-rong Xia Shan-hong ① (State Key Lab of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China) ②(Graduate University of the Chinese Academy of Sciences, Beijing 100039, China) Abstract: A new micromechanical electric field sensor system with a closed-loop autonomous driving circuit is designed and simulated. The closed-loop autonomous driving circuit, which uses the principle of auto-gain-control, keeps the micro sensor working in the resonance state, and keeps the stable resonance amplitude. The simulation result shows, compared with the open-loop driving mode, the sensor can catch the new resonance frequency, the attenuation of libration amplitude is reduced from 30% to 0.1%, and the attenuation of the sensitivity of the sensor is reduced from 50% to 0.1%, when the resonance frequency changes 0.5%. Key words: Micromechanical electric field sensor; Closed-loop; Autonomous driving circuit 1 引言