MEMS传感器在智能手机等移动设备中的应用.ppt

The application of MEMS sensors in smart phones and other mobile devices components of presentation 1 2 3 Introduction of MEMS Application of MEMS sensors in mobile devices More advanced applications of MEMS sensors What is MEMS ? MEMS (Microelectromechanical systems ) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MicroSensors MicroActuators MicroStructures MicroElectronics Auto safety system Braking antilock brake systems Smart phones digital camera music player laptop/notebook computer Miniature inertial navigation system Space attitude determination system Communications Biotechnology/Medicine … The application of MEMS IMU (Inertial Measurement Unit)—Accelerometer/Gyroscope/Electronic compass Pressure sensor Silicon microphone CMOS image sensor/AF actuator/Ambient light sensor Proximity sensors MEMS oscillators/RF switch Three-axis gyroscope Measurement of the angular velocity in order to determine the state of motion of the object, also known as motion sensors. Let iPhones know “where they are or where they’re going” 智能手机中采用的MEMS陀螺仪，芯片内部含有一块微型磁性体，可以在手机进行旋转运动时产生的科里奥力作用下向X,Y,Z三个方向发生位移，利用这个原理便可以测出手机的运动方向。而芯片核心中的另外一部分则可以将有关的传感器数据转换为手机可以识别的数字格式，所以，当该系统运行时，无论你将手机上移或者甩动，里面的芯片接受指令就会向手机CPU传输数据，使得手机能够做出正确的回应。 Silicon microphone MEMS麦克风是由MEMS微电容传感器、微集成转换电路(放大器)、声腔及RF抗噪电路组成。MEMS微电容极头部分包含接收声音的硅振膜和硅背极,硅振膜可直接将接收到的音频信号经MEMS微电容传感器传输给微集成电路,微集成电路可将高阻的音频电信号转换并放大成低阻的音频电信号,同时经RF抗噪电路滤波,输出与手机前置电路相匹配的电信号.完成“声--电”转换. Specification MEMS Microphone Frequency range 100-10,000Hz Output impedance 100 Ω max Signal to noise ratio (SNR) 58dB RF-filtering capacitance 10pF, 33pF, both or none Change in sensitivity(电压特性) 1dB across voltage range Standard operating temperature -40℃ to + 100℃ Current consumption 0.25mA Supply voltage ratings 1.5V to 3.6V 体积小. 便于SMT安装. 耐高温,稳定性好. 灵活的设计应用. 兼容数字化发展. 自动化程度高. 适合大批量生产. MEMS Mic CMOS image sensor CMOS(Complementary Metal-Oxide-Semico