全自动硅片装片机上料机械手设计.docx

PAGE 6 PAGE 5 摘要 随着工业自动化的普及和发展，自动化设备的需求量逐年增大，其中尤其是机械手的应用也越来越普遍，其主要应用在汽车，电子，机械加工、食品、医药等领域的生产流水线或货物装卸调运过程中，其可以更好地节约能源和提高运输设备或产品的效率，以降低其他搬运方式的限制和不足，满足现代经济发展的要求。 真空吸盘作为机械手中的一种常见结构形式，具有无污染、易使用易维护、不伤工件的特点，广泛应用在电子领域的电路板与电子行业中，如用于硅片的搬运。 ?本机械手的机械结构主要包括硅片原料定位机构设计， 拾取吸盘运动机构（x、z方向），运料吸盘运动机构（x、y方向）；其动作转换靠设置在各个不同部位的传感器产生的信号传输到PLC控制器，通过PLC内部程序输出不同的信号，从而驱动外部线圈来控制电动滑台或电磁阀产生不同的动作，可实现机械手的精确定位；其动作过程包括：下降、吸取、上升、快进、停止、下降、放松、上升、快退、停止等循环往复工作；其操作方式包括：回原位、手动、单步、单周期、连续；来满足生产中的各种操作要求。 ?关键词：机械手；真空吸盘；机构设计；PLC。 Abstract With the popularization and development of industrial automation, automation equipment demand increased year by year, especially the application of manipulator is becoming more and more popular, its main application in the field of automotive, electronics, machinery, food, medicine and other production lines or cargo transport process, which can better energy conservation and improve the efficiency of transport equipment or products, in order to reduce the limitations and shortcomings of other modes of transport, to meet the requirements of modern economic development. Vacuum suction as a manipulator of a kind of common structure form, with no pollution, easy to use, easy maintenance, not to hurt the workpiece, is widely used in the field of electronic circuit board and electronic industry, such as for wafer handling. ?The mechanical structure of the manipulator positioning mechanism mainly includes the design of silicon raw materials, pick up the suction motion mechanism (x, z), material transport mechanism (x, sucker Y direction); the action of conversion by setting in different parts of the sensor signal transmission to the PLC controller, the signal through the PLC internal different output, which drives the external coil to control the electric slide or solenoid valves have a different action, the robot can achieve precise positioning; the process includes: draw, rise, decline, fast forward, stop, drop, relax, rise, rewind, stop work cycle; including its mode of operat