氧化物薄膜应力的X射线衍射表征与分析.pdfVIP

ABSTRACT ABSTRACT Oxide thin films can be widely used in the fields of microelectronics, optoelectronics and microelectronic mechanism systems. Electronic devices have been integrated with development of information age, therefore, devices were transformed from the tradition to thin films devices and from separated to integrated devices. Microstructure, strain, surface topography and efficiency of oxide