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Vacuum90(2013)145e150 Contents lists available atSciVerse ScienceDirect Vacuum journal homepage: /locate/vacuum Effect of substrate bias voltage on the properties of CrCN and CrN coatings deposited bycathodic arc evaporation B.Warcholinski*,A.Gilewicz Koszalin University of Technology,Institute ofMechatronics, Nanotechnology and Vacuum Technique, Sniadeckich 2,75-453 Koszalin, Poland a r t i c l e i n f o a b s t r a c t Article history: Thesubstratebiasvoltageisoneofthesigni?cantparametersoftechnologycontrollingthemechanical properties of PVD coatings.Chromium nitride and chromium carbonitride coatingswere depositedon HS6-5-2 steel substrates by cathodic arc evaporation technique. The relationships between one of depositionparameter,negativesubstratebiasvoltagesVs(10Ve300V),andthecoatingscharacterization suchasmicrohardness,stress,adhesionofthecoatings,elasticstraintofailurerelatedtoH/Eratiowere investigated.OnSEMphotosonecanobserveadensepolycrystallinestructurewithcolumnargrainsfor thecoatingsdepositedatlowbiasvoltageandhomogenous,?ne-grainedmorphologyobtainedathigher biasvoltage.Residualstressesweremeasuredbysubstratecurvaturetechnique.TheCrNcoatingsshow acompressiveresidualstressthatincreasesfrom1.0(Vs?à10V)to2.1GPa(Vs?à70V).Athigherbias voltagesadecreaseofthecompressiveresidualstressesisapparent.Similarrelationbutforhigherstress valuesisobservedforCrCNcoatings.Nanoindentationshowedamaximumhardnessof25GPaforCrN and26GPaforCrCNcoatingsdepositedatà150Vofbiasvoltage.ThecriticalloadsofCrNcoatingsin ascratchtestdecreasedmonotonicallyfrom95Nto78Nwithincreasingnegativesubstratebiasvoltage. ThecriticalloadofCrCNcoatingswasnearlyconstant,about78N. Received 15October 2011 Received in revised form 24April 2012 Accepted 27April 2012 Keywords: CrCN coatings CrN coatings Cathodic arc evaporation Bias Hardness Adhesion ó2012ElsevierLtd.Allrightsreserved. 1. Introduction pointed outthatfriction coef?cientandwearrateofCrCNcoatings depend on their carbon content