DLC膜的多气源制备及应用-电子与通信工程专业毕就业论文.docxVIP

AbstractDLC Abstract DLC film(Diamond-Like Carbon，DLC)is all amorphous carbon material with many similar properties as crystalline diamond，and is widely used in mechanical， optical，electrical and biological fields． Plasma chemical vapor deposition(PECVD)method is a common method for the growth of hydrogenated DLC fills，and the substrate is usually placed on the powered electrode of PECVD cavity to grow DLC film，the DLC film grown this way has higher hardness．In this paper,the immersive PECVD method is used to grow DLC films，which immerses the substrate into the plasma and create different elec