光刻技术及应用.docVIP

PAGE PAGE 8 Lithography Lithography (from \o Greek language Greek \o wikt:λ??θο?? λ??θο??, lithos, stone + \o wikt:γρ??φειν γρ??φειν, graphein, to write) is a method of \o Printing printing originally based on the principle that oil and water do not mix. [1] Printing is from a stone ( \o Lithographic limestone lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by German author and actor \o Alois Senefelder Alois Senefelder as a cheap method of publishing theatrical works. [2] [3] Lithography can be used to print text or \o Artwork (graphic arts) artwork onto paper or other suitable material. [4] Lithography originally used an image drawn with oil, fat, or wax onto the surface of a smooth, level \o Lithographic limestone lithographic limestone plate. The stone was treated with a mixture of acid and gum arabic, \o Etching etching the portions of the stone which were not protected by the grease-based image. When the stone was subsequently moistened, these etched areas retained water; an oil-based ink could then be applied and would be repelled by the water, sticking only to the original drawing. The ink would finally be transferred to a blank \o Paper paper sheet, producing a \o Printing printed page. This traditional technique is still used in some \o Fine art fine art printmaking applications. In modern lithography, the image is made of a \o Polymer polymer coating applied to a flexible aluminum plate. The image can be printed directly from the plate (the orientation of the image is reversed), or it can be \o Offset printing offset, by transferring the image onto a flexible sheet (rubber) for printing and publication. As a printing technology, lithography is different from \o Intaglio (printmaking) intaglio printing (gravure), wherein a plate is either \o Engraving engraved, \o Etching etched, or \o Mezzotint stippled to score cavities to contain the printing ink; and \o Woodblock printi