SEM扫描电镜课件.ppt

SEM扫描电镜;*;分辨率（Resolution）;*;Theoretical resolution of optical microscope;For glass lens: ?~90o，sin?~0.95. When the medium is air, n=1, the resolution is;When accelerating voltage V500Volts, the velocity of electron is much smaller than the speed of light, m?m0 (mass of static electron, 9.109?10-31kg). so;For most TEM, V is about 100-200kV, the velocity of the electrons becomes greater than half the speed of light! Relativistic effects should be taken into account.;From;电子显微镜的发展历程;电子显微镜的发展历程;鲁斯卡（Ernst Ruska， 1906-1988）;Comparison of Electron microscope with optical microscope;*;Secondary Electrons (SE);Backscattered Electrons (BSE);*;*;*;*;*;*;*;Short magnetic lens is used in electron microscope;the trajectory of electron rotates;电子显微镜的像差;Spherical aberration;Spherical aberration;Spherical aberration;*;Astigmatism（象散）;Astigmatism;Distortion;Chromatic aberration;日光透过三棱镜后的色散现象;Chromatic aberration;Comparison of aberrations;Cs corrector consist of a series of two hexapole and two transfer lenses doublets located between the objective and first intermediate lenses in the microscope column. The Cs corrector nulls the Cs. ;*;*;*;*;*;JEM-2010F microscope with Cs corrector installed;*;电子枪;热源电子枪;场发射枪;Characteristics of the three sources operating at 100kV;*;Image Formation in SEM;*;*;*;*;*;*;*;电制冷 SDD探头;*;*;*;*;*;*;*;*;Features of EDS;*;Features of WDS; WDS has much high resolution compared with EDS. The overlapped peak in EDS may be separated in WDS.;Comparison of EDS and WDS;*;*;*;*;*;*;*;*;*;*;*;*