Q_320505HRT002-2018X61_62型系列双面研磨_抛光机.pdf

标准分类号：J64 备案号： Q/HRT 苏州赫瑞特电子专用设备科技有限公司企业标准 Q/320505HRT002-2018 代替Q/320505HRT002-2015 X61/62 型系列双面研磨/抛光机 2018-6-20 发布 2018-7-1 实施 苏州赫瑞特电子专用设备科技有限公司发布 1 Q/320505HRT002-2018 目次 前言 ··············································································3 1 范围 ···········································································4 2 规范性引用文件 ·································································4 3 产品型号 ·······································································5 4 主要技术参数 ···································································5 5 技术要求 ········································································12 6 试验方法 ·······································································14 7 检验规则 ······································································15 8 标志、包装、运输、贮存 ·························································16 2 Q/320505HRT002-2018 前言 本产品属于电子专用非标设备，尚无相应的国家或行业标准提供依据及参考，本标准中所涉及的各 项技术参数、精度指标均由我公司自行制定。 本标准由苏州赫瑞特电子专用设备科技有限公司提出； 本标准由苏州赫瑞特电子专用设备科技有限公司研发中心归口； 本标准由苏州赫瑞特电子专用设备科技有限公司研发中心起草。 本标准首次发布时间为2018 年6 月20 日。 3 Q/320505HRT002-2018 X61/62 型系列双面研磨/抛光机 1 范围 本标准规定了X61/62 型系列双面研磨/抛光机的产品型号、主要技术参数、技术要求、试验方法、 检测规则、标志、包装、运输、贮存。 本标准适用于对光学光电子、半导体、太阳能、视窗等行业的电子材料，即:半导体材料，如硅、 碳化硅、Ⅲ-Ⅴ族化合物（砷化镓；磷化铟等）、硅化物