电镜材料检测方法.pptVIP

加速电压对 SEM 像的影响  When theoretically considering the electron probe diameter alone, the higher the accelerating voltage, the smaller is the electron probe. However, there are some unnegligible demerits in increasing the accelerating voltage. They are mainly as follows: 1) Lack of detailed structures of specimen surfaces. 2) Remarkable edge effect. 3) Higher possibility of charge-up. 4) Higher possibility of specimen damage. In SEM, finer surface structure images can generally be obtained with lower accelerating voltages. At higher accelerating voltages, the beam penetration and diffusion area b