Sputter原理和流程课件.ppt

Sputter原理和流程;Sputter原理;;電子平均自由徑比較; Magnetron DC Sputtering;Parameter;Sputtering principle;Crystal Growth Mechanism;Crystal Growth Mechanism;;Crystal Growth Mechanism;Crystal Growth Mechanism;PVD Flow;L/UL;L/UL;L/UL;L/UL;L/UL;L/UL;Sputter Process Flow:;Hillock （Al）;Hillock （Al）;Splash;Splash;Nodule（ITO）;Nodule（ITO） ;Void;Void;Spike(Al);Spike(Al);Electromigration（Al）;Electromigration（Al）;Peeling/Crack;Peeling/Crack;Filling Bad;Filling Bad;Inclusion;Inclusion;其它;其它;其它;Thank you all;;PVD Tool